One way is making the areas damaged into property. If you own land, you generally don’t want it polluted because it would lower the value. In those examples, make the water table and ecosystems into something people can own in portions. This is done with “views” that skyscrapers would otherwise block.

Should be done with orbits to prevent space debris.

The trouble is it seems impossible to turn certain externalities into property. It would require hard thinking and innovation. And just like regulations, it would lag behind industry and miss unknowns (lead, micro plastics).